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材料简介
Introduction
FLH331是由合成砂制成的石英材料,具有纯度高、少气泡,无包裹体、透过率高、耐刻蚀、耐高温等特性。
可运用于半导体先进制程、光学、化学加工、紫外线和高温窗口等。
FLH331 is a quartz material made of synthetic sand. Thanks to the high purity, few bubbles, no inclusions, high transmittance, etching resistance, high temperature resistance and other characteristics,FLH331 could be used in advanced semiconductor manufacturing process, optics, chemical processing, ultraviolet and high temperature windows,etc.
杂质含量
Chemical purity
FLH331 杂质元素典型值 (ppm)
Al
0.14
B
0
Ca
0.41
Co
0
Cu
0
Fe
0.13
K
0
Li
0
Mg
0.06
Mn
0
Na
0.29
Ni
0
Ti
0
OH
200
紫外光谱透过性能
UV spectral transmittance
气泡及异物情况
Bubbles and inclusions
气泡及异物数量 (100g玻璃中允许)
The allowable number of bubbles and foreign matter per 100g of glass
气泡直径(mm)及个数
The diameter(mm) and number of bubbles
0.03~0.30
0
0.31~0.70
0
>0.7
0
总数个
0
透明或不透明杂质的直径(mm)及个数
The diameter (mm) and number of transparent or opaque impurities
0.3~0.7
0
0.8~1.0
0
1.1~3.0
0
总数个
0
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