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气熔高纯无气泡石英材料
FLH331

材料简介

Introduction

331产品图280-496 拷贝.jpg

FLH331是由合成砂制成的石英材料,具有纯度高、少气泡,无包裹体、透过率高、耐刻蚀、耐高温等特性。
可运用于半导体先进制程、光学、化学加工、紫外线和高温窗口等。


FLH331 is a quartz material made of synthetic sand. Thanks to the high purity, few bubbles, no inclusions, high transmittance, etching resistance, high temperature resistance and other characteristics,FLH331 could be used in advanced semiconductor manufacturing process, optics, chemical processing, ultraviolet and high temperature windows,etc.

  杂质含量

  Chemical purity


FLH331 杂质元素典型值   (ppm)

Al

0.14

B

0

Ca

0.41

Co

0

Cu

0

Fe

0.13

K

0

Li

0

Mg

0.06

Mn

0

Na

0.29

Ni

0

Ti

0

OH

200

紫外光谱透过性能

UV spectral transmittance

331光谱扫描曲线280-540.jpg

气泡及异物情况

Bubbles and inclusions

气泡及异物数量 (100g玻璃中允许)   
The allowable number of bubbles and foreign matter per 100g of glass

气泡直径(mm)及个数   
The diameter(mm) and number of bubbles

0.03~0.30

0

0.31~0.70

0

>0.7

0

总数个

0

透明或不透明杂质的直径(mm)及个数   
The diameter (mm) and number of transparent or opaque impurities

0.3~0.7

0

0.8~1.0

0

1.1~3.0

0

总数个

0

  菲利华石英材料 
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